Laser assisted material deposition

Details Laser assisted material deposition Laser assisted material deposition

2007-12-25

2007-12-25

Chen, Bret (Department: 1762)

Coating processes

Direct application of electrical, magnetic, wave, or...

Electromagnetic or particulate radiation utilized

C427S096800

Reexamination Certificate

active

10683806

ABSTRACT:
A method of forming a film on a substrate includes activating a gas precursor to form a material on the substrate by irradiating the gas precursor with electromagnetic energy at a frequency tuned to an absorption frequency of the gas precursor.

REFERENCES:
patent: 4543486 (1985-09-01), Rose
patent: 4579750 (1986-04-01), Bowen et al.
patent: 4655849 (1987-04-01), Schachameyer et al.
patent: 4668304 (1987-05-01), Schachameyer et al.
patent: 4670063 (1987-06-01), Schachameyer et al.
patent: 4670064 (1987-06-01), Schachameyer et al.
patent: 4685976 (1987-08-01), Schachameyer et al.
patent: 4933206 (1990-06-01), Cox
patent: 4938996 (1990-07-01), Ziv et al.
patent: 4940505 (1990-07-01), Schachameyer et al.
patent: 4980198 (1990-12-01), Dowben et al.
patent: 5102830 (1992-04-01), Sandhu
patent: 5164222 (1992-11-01), Gottsleben et al.
patent: 5387443 (1995-02-01), Ota et al.
patent: 5403433 (1995-04-01), Morrison et al.
patent: 5438019 (1995-08-01), Sandhu
patent: 5472935 (1995-12-01), Yandrofski et al.
patent: 5641545 (1997-06-01), Sandhu
patent: 5648114 (1997-07-01), Paz De Araujo et al.
patent: 5682041 (1997-10-01), Kawakubo et al.
patent: 5733609 (1998-03-01), Wang
patent: 5800617 (1998-09-01), Sandhu
patent: 6051287 (2000-04-01), Marsh
patent: 6064800 (2000-05-01), Gurtej
patent: 6113751 (2000-09-01), Morgenthaler
patent: 6143085 (2000-11-01), Marsh
patent: 6187492 (2001-02-01), Ri et al.
patent: 6281072 (2001-08-01), Li et al.
patent: 6291341 (2001-09-01), Sharan et al.
patent: 6499425 (2002-12-01), Sandhu et al.
patent: 6573199 (2003-06-01), Sandhu et al.
patent: 6613702 (2003-09-01), Sandhu et al.
patent: 6683005 (2004-01-01), Sandhu et al.
patent: 6720272 (2004-04-01), Sandhu et al.
patent: 6730367 (2004-05-01), Sandhu et al.
patent: 6764856 (2004-07-01), Sandhu et al.
patent: 6793736 (2004-09-01), Sandhu et al.
patent: 6797337 (2004-09-01), Dando et al.
patent: 6838114 (2005-01-01), Carpenter et al.
patent: 6838121 (2005-01-01), Weimer
patent: 6845734 (2005-01-01), Carpenter et al.
patent: 6869479 (2005-03-01), Shafeev et al.
patent: 2003/0170389 (2003-09-01), Sandhu
patent: 2005/0266168 (2005-12-01), Poullos

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