4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Philip H. Campbell

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Apparatus and process of improving atomic layer deposition...

Single-crystal – oriented-crystal – and epitaxy growth processes; – Forming from vapor or gaseous state – Including change in a growth-influencing parameter
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Apparatus and process of improving atomic layer deposition...

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Apparatus and process of improving atomic layer deposition...

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Chemical vapor deposition apparatus

Coating apparatus – Gas or vapor deposition – Chamber seal
Reexamination Certificate

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Chemical vapor deposition apparatus

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Profile ID: LFUS-PAI-P-2432869

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