4. Etching a substrate: processes
  5. Etching of semiconductor material to produce an article...

Craig M. Carpenter

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Apparatus and method for depositing materials onto...

Coating apparatus – Program – cyclic – or time control
Reexamination Certificate

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Chemical vapor deposition apparatus

Coating apparatus – Gas or vapor deposition – Chamber seal
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Chemical vapor deposition apparatus

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Chemical vapor deposition apparatus and deposition method

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Chemical vapor deposition method

Coating processes – Coating by vapor – gas – or smoke
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