Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1990-03-30
1990-12-04
Powell, William A.
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
156643, 156656, 1566591, 156662, 156345, 20419233, 21912169, H01L 21306, B44C 122, C23F 102, B29C 3700
Patent
active
049751417
ABSTRACT:
A method for detecting the endpoint in an etching process including the steps of: providing a structure to be etched including at least a first layer of material overlying a second layer of material; ablating an aperture in the first layer using a beam of coherent electromagnetic radiation so as to expose a portion of the second layer; exposing the structure to an etchant for etching the second layer; and monitoring the second layer using the ablated aperture so as to detect an endpoint for the etching process.
REFERENCES:
patent: 4198261 (1980-04-01), Busta et al.
patent: 4479848 (1984-10-01), Otsubo et al.
patent: 4496425 (1985-01-01), Kuyel
patent: 4611919 (1986-09-01), Brooks et al.
patent: 4687539 (1987-08-01), Burns et al.
patent: 4717446 (1988-01-01), Nagy et al.
Greco Nancy A.
Nogay Joseph P.
Brandt Jeffrey L.
International Business Machines - Corporation
Powell William A.
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