Large-field scanning of charged particles

Details Large-field scanning of charged particles Large-field scanning of charged particles

2008-07-01

2008-07-01

Berman, Jack I. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S306000, C250S307000, C250S308000, C250S3960ML, C250S492200, C382S145000

Reexamination Certificate

active

07394069

ABSTRACT:
One embodiment relates to a charged-particle beam apparatus. The apparatus includes at least a source for generating the charged-particle beam, a first deflector, and a second deflector. The first deflector is configured to scan the charged-particle beam in a first dimension. The second deflector is configured to deflect the scanned beam such that the scanned beam impinges telecentrically (perpendicularly) upon a surface of a target substrate. Other embodiments are also disclosed.

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