Lanthanum hafnium oxide dielectrics

Details Lanthanum hafnium oxide dielectrics Lanthanum hafnium oxide dielectrics

2007-06-26

2007-06-26

Le, Dung A. (Department: 2818)

Semiconductor device manufacturing: process

Coating of substrate containing semiconductor region or of...

Insulative material deposited upon semiconductive substrate

C438S778000, C438S783000

Reexamination Certificate

active

11010529

ABSTRACT:
Dielectric layers containing a lanthanum hafnium oxide layer, where the lanthanum hafnium oxide layer is formed as a structure of one or more monolayers, and methods of fabricating such dielectric layers provide an insulating layer in a variety of structures for use in a wide range of electronic devices.

REFERENCES:
patent: 3357961 (1967-12-01), Makowski et al.
patent: 3488633 (1970-01-01), King et al.
patent: 4058430 (1977-11-01), Suntola et al.
patent: 4413022 (1983-11-01), Suntola et al.
patent: 5049516 (1991-09-01), Arima
patent: 5055319 (1991-10-01), Bunshah et al.
patent: 5426603 (1995-06-01), Nakamura et al.
patent: 5445699 (1995-08-01), Kamikawa et al.
patent: 5496597 (1996-03-01), Soininen et al.
patent: 5562952 (1996-10-01), Nakahigashi et al.
patent: 5572052 (1996-11-01), Kashihara et al.
patent: 5646583 (1997-07-01), Seabury et al.
patent: 5674563 (1997-10-01), Tarui et al.
patent: 5698022 (1997-12-01), Glassman et al.
patent: 5751021 (1998-05-01), Teraguchi
patent: 5792269 (1998-08-01), Deacon et al.
patent: 5801105 (1998-09-01), Yano et al.
patent: 5810923 (1998-09-01), Yano et al.
patent: 5827571 (1998-10-01), Lee et al.
patent: 5828080 (1998-10-01), Yano et al.
patent: 5840897 (1998-11-01), Kirlin et al.
patent: 5916365 (1999-06-01), Sherman
patent: 6010969 (2000-01-01), Vaartstra
patent: 6019848 (2000-02-01), Frankel et al.
patent: 6020024 (2000-02-01), Maiti et al.
patent: 6020243 (2000-02-01), Wallace et al.
patent: 6025627 (2000-02-01), Forbes et al.
patent: 6027961 (2000-02-01), Maiti et al.
patent: 6059885 (2000-05-01), Ohashi et al.
patent: 6110529 (2000-08-01), Gardiner et al.
patent: 6115401 (2000-09-01), Scobey et al.
patent: 6200893 (2001-03-01), Sneh
patent: 6203613 (2001-03-01), Gates et al.
patent: 6207589 (2001-03-01), Ma et al.
patent: 6211035 (2001-04-01), Moise et al.
patent: 6217645 (2001-04-01), Vaartstra
patent: 6225237 (2001-05-01), Vaartstra
patent: 6230651 (2001-05-01), Ni et al.
patent: 6273951 (2001-08-01), Vaartstra
patent: 6274937 (2001-08-01), Ahn et al.
patent: 6281042 (2001-08-01), Ahn et al.
patent: 6294813 (2001-09-01), Forbes et al.
patent: 6297103 (2001-10-01), Ahn et al.
patent: 6297539 (2001-10-01), Ma et al.
patent: 6313035 (2001-11-01), Sandhu et al.
patent: 6323081 (2001-11-01), Marsh
patent: 6323511 (2001-11-01), Marsh
patent: 6329286 (2001-12-01), Vaartstra
patent: 6331465 (2001-12-01), Forbes et al.
patent: 6342445 (2002-01-01), Marsh
patent: 6347749 (2002-02-01), Moore et al.
patent: 6350704 (2002-02-01), Ahn et al.
patent: 6352591 (2002-03-01), Yieh et al.
patent: 6365470 (2002-04-01), Maeda
patent: 6368398 (2002-04-01), Vaartstra
patent: 6380579 (2002-04-01), Nam et al.
patent: 6387712 (2002-05-01), Yano et al.
patent: 6395650 (2002-05-01), Callegari et al.
patent: 6403414 (2002-06-01), Marsh
patent: 6404027 (2002-06-01), Hong et al.
patent: 6420279 (2002-07-01), Ono et al.
patent: 6426292 (2002-07-01), Vaartstra
patent: 6441417 (2002-08-01), Zhang et al.
patent: 6444592 (2002-09-01), Ballantine et al.
patent: 6451641 (2002-09-01), Halliyal et al.
patent: 6451695 (2002-09-01), Sneh
patent: 6452229 (2002-09-01), Krivokapic
patent: 6455717 (2002-09-01), Vaartstra
patent: 6458701 (2002-10-01), Chae et al.
patent: 6465334 (2002-10-01), Buynoski et al.
patent: 6482740 (2002-11-01), Soininen et al.
patent: 6495436 (2002-12-01), Ahn et al.
patent: 6495458 (2002-12-01), Marsh
patent: 6509280 (2003-01-01), Choi
patent: 6514820 (2003-02-01), Ahn et al.
patent: 6514828 (2003-02-01), Ahn et al.
patent: 6534357 (2003-03-01), Basceri
patent: 6534420 (2003-03-01), Ahn et al.
patent: 6537613 (2003-03-01), Senzaki et al.
patent: 6541079 (2003-04-01), Bojarczuk, Jr. et al.
patent: 6544846 (2003-04-01), Ahn et al.
patent: 6551929 (2003-04-01), Kori et al.
patent: 6552383 (2003-04-01), Ahn et al.
patent: 6555879 (2003-04-01), Krivokapic et al.
patent: 6570248 (2003-05-01), Ahn et al.
patent: 6586792 (2003-07-01), Ahn et al.
patent: 6592942 (2003-07-01), Van Wijck
patent: 6596583 (2003-07-01), Agarwal et al.
patent: 6602720 (2003-08-01), Hsu et al.
patent: 6608378 (2003-08-01), Ahn et al.
patent: 6613656 (2003-09-01), Li
patent: 6617634 (2003-09-01), Marsh et al.
patent: 6617639 (2003-09-01), Wang et al.
patent: 6632279 (2003-10-01), Ritala et al.
patent: 6638859 (2003-10-01), Sneh et al.
patent: 6642567 (2003-11-01), Marsh
patent: 6642573 (2003-11-01), Halliyal et al.
patent: 6645882 (2003-11-01), Halliyal et al.
patent: 6646307 (2003-11-01), Yu et al.
patent: 6652924 (2003-11-01), Sherman
patent: 6660631 (2003-12-01), Marsh
patent: 6660660 (2003-12-01), Haukka et al.
patent: 6661058 (2003-12-01), Ahn et al.
patent: 6682602 (2004-01-01), Vaartstra
patent: 6686212 (2004-02-01), Conley, Jr. et al.
patent: 6690055 (2004-02-01), Uhlenbrock et al.
patent: 6699747 (2004-03-01), Ruff et al.
patent: 6709989 (2004-03-01), Ramdani et al.
patent: 6710538 (2004-03-01), Ahn et al.
patent: 6713846 (2004-03-01), Senzaki
patent: 6720221 (2004-04-01), Ahn et al.
patent: 6730575 (2004-05-01), Eldridge
patent: 6767582 (2004-07-01), Elers
patent: 6767795 (2004-07-01), Ahn et al.
patent: 6770536 (2004-08-01), Wilk et al.
patent: 6774050 (2004-08-01), Ahn et al.
patent: 6777353 (2004-08-01), Putkonen
patent: 6780704 (2004-08-01), Raaijmakers et al.
patent: 6787413 (2004-09-01), Ahn
patent: 6790791 (2004-09-01), Ahn et al.
patent: 6794315 (2004-09-01), Klemperer et al.
patent: 6794709 (2004-09-01), Ahn et al.
patent: 6800567 (2004-10-01), Cho
patent: 6803311 (2004-10-01), Choi
patent: 6803326 (2004-10-01), Ahn et al.
patent: 6804136 (2004-10-01), Forbes
patent: 6808978 (2004-10-01), Kim
patent: 6812100 (2004-11-01), Ahn et al.
patent: 6828632 (2004-12-01), Bhattacharyya
patent: 6831315 (2004-12-01), Raaijmakers et al.
patent: 6833285 (2004-12-01), Ahn et al.
patent: 6833308 (2004-12-01), Ahn et al.
patent: 6835111 (2004-12-01), Ahn et al.
patent: 6844203 (2005-01-01), Ahn et al.
patent: 6844260 (2005-01-01), Sarigiannis et al.
patent: 6852167 (2005-02-01), Ahn
patent: 6858444 (2005-02-01), Ahn et al.
patent: 6858865 (2005-02-01), Ahn et al.
patent: 6878624 (2005-04-01), Bruley et al.
patent: 6884739 (2005-04-01), Ahn et al.
patent: 6888739 (2005-05-01), Forbes
patent: 6893984 (2005-05-01), Ahn et al.
patent: 6900122 (2005-05-01), Ahn et al.
patent: 6914800 (2005-07-01), Ahn et al.
patent: 6921702 (2005-07-01), Ahn et al.
patent: 6930059 (2005-08-01), Conley, Jr. et al.
patent: 6950340 (2005-09-01), Bhattacharyya
patent: 6952032 (2005-10-01), Forbes et al.
patent: 6953730 (2005-10-01), Ahn et al.
patent: 6958302 (2005-10-01), Ahn et al.
patent: 6960538 (2005-11-01), Ahn et al.
patent: 6979855 (2005-12-01), Ahn et al.
patent: 6989565 (2006-01-01), Aronowitz et al.
patent: 6989573 (2006-01-01), Ahn et al.
patent: 7026694 (2006-04-01), Ahn et al.
patent: 7045430 (2006-05-01), Ahn et al.
patent: 7049192 (2006-05-01), Ahn et al.
patent: 7064058 (2006-06-01), Ahn et al.
patent: 7081421 (2006-07-01), Ahn et al.
patent: 7084078 (2006-08-01), Ahn et al.
patent: 7101813 (2006-09-01), Ahn et al.
patent: 7129553 (2006-10-01), Ahn et al.
patent: 7135369 (2006-11-01), Ahn et al.
patent: 7135421 (2006-11-01), Ahn et al.
patent: 7160577 (2007-01-01), Ahn et al.
patent: 2001/0002280 (2001-05-01), Sneh
patent: 2001/0009695 (2001-07-01), Saanila et al.
patent: 2001/0030352 (2001-10-01), Ruf et al.
patent: 2001/0042505 (2001-11-01), Vaartstra
patent: 2001/0052752 (2001-12-01), Ghosh et al.
patent: 2002/0001971 (2002-01-01), Cho
patent: 2002/0003403 (2002-01-01), Ghosh et al.
patent: 2002/0004276 (2002-01-01), Ahn et al.
patent: 2002/0004277 (2002-01-01), Ahn et al.
patent: 2002/0024080 (2002-02-01), Derderian et al.
patent: 2002/0025628 (2002-02-01), Derderian et al.
patent: 2002/0046705 (2002-04-01), Sandhu et al.
patent: 2002/0053869 (2002-05-01), Ahn et al.
patent: 2002/0068466 (2002-06-01), Lee et al.
patent: 2002/0086507 (2002-07-01), Park et al.
patent: 2002/0086521 (2002-07-01), Ahn et al.
patent: 2002/0086555 (2002-07-01), Ahn et al.
patent: 2002/0089023 (2002-07-01), Yu et al.
patent: 2002/0089063 (2002-07-01), Ahn et al.
patent: 2002/0094632 (2002-07-01), Agarwal et a

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