Radiant energy – Inspection of solids or liquids by charged particles
Patent
1993-01-26
1993-11-30
Dzierzynski, Paul M.
Radiant energy
Inspection of solids or liquids by charged particles
250307, H01J 3726
Patent
active
052668010
ABSTRACT:
A microscope of the scanning probe variety. This device circumvents one of the serious problems of prior art scanning probe microscopes, i.e. that the probe is always near or on the surface of the object being scanned, creating the danger of damaging the probe on the surface especially on large scans or at high scan speeds. The microscope of this invention jumps the probe over the surface, causing the probe to be near or on the surface during only a very limited portion of the scan and therefore able to scan quickly over rough surfaces without undue damage to the probe or surface. Both scanning tunneling microscopes and atomic force microscopes employing the invention are disclosed. The scanning tunneling microscope is shown with both digital and analog control of the movement of the probe.
REFERENCES:
patent: 2405133 (1946-08-01), Brown
patent: 2460726 (1949-02-01), Arndt, Jr.
patent: 3049002 (1962-08-01), Hediger
patent: 3378648 (1968-04-01), Fenner
patent: 4106333 (1978-08-01), Salje et al.
patent: 4359892 (1982-11-01), Schnell et al.
patent: 4618767 (1986-10-01), Smith et al.
patent: 4665313 (1982-05-01), Wells
patent: 4724318 (1988-02-01), Binnig
patent: 4814622 (1989-03-01), Gregory et al.
patent: 4823004 (1989-04-01), Kaiser et al.
patent: 4848141 (1989-07-01), Oliver et al.
patent: 4861990 (1989-08-01), Coley
patent: 4902892 (1990-02-01), Okayama et al.
patent: 4912822 (1990-04-01), Zdeblick et al.
patent: 4939363 (1990-07-01), Bando et al.
patent: 4985627 (1991-01-01), Gutierrez et al.
patent: 5015850 (1991-05-01), Zdeblick et al.
patent: 5092163 (1992-03-01), Young
patent: 5162653 (1992-11-01), Hosaka et al.
patent: 5168159 (1992-12-01), Yagi
patent: 5171992 (1992-12-01), Clabes et al.
"Atomic Force Microscope-Force Mapping and Profiling on a sub 100-A Scale", Y. Martin et al, IBM, T. J. Research Center Yorktown Hghts, N.Y., pp. 4723-4729.
"Investigation of Bloch Wall Fine Structures by Magnetic Force Microscopy", T. Goddenhenrich et al, Journal of Microscopy, vol. 152, Pt. 2, Nov. 1988, pp. 527-536.
"A Batch-Fabricated Silicon Accelerometer", Lynn Michelle Roylance, IEEE Transactions on Electron Devices, vol. ED-26, No. 12, Dec. 1979.
"Pressure Sensors Selection Guide PC Board Mountable", ICSENSORS, Milpitas, Calif., TO-8 Series.
"Force Measurement Using An AC Atomic Force Microscope", William A. Ducker, et al., J. Appl. Phys. 67 (9), May 1, 1990, New York.
"Potentiometry for Thin-Film Structures Using Atomic Force Microscopy," J. Vac. Sci. Technol. A, vol. 8, No. 1, Jan./Feb. 1990; pp. 394-399 Anders et al.
Elings Virgil B.
Gurley John A.
Digital Instruments, Inc.
Dzierzynski Paul M.
Nguyen Kiet T.
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