Jumping probe microscope

Details Jumping probe microscope Jumping probe microscope

1989-06-05

1993-07-20

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

250307, H01J 3726

Patent

active

052296067

ABSTRACT:
A microscope of the scanning probe variety. This device circumvents one of the serious problems of prior art scanning probe microscopes, i.e. that the probe is always near or on the surface of the object being scanned, creating the danger of damaging the probe on the surface especially on large scans or at high scan speeds. The microscope of this invention jumps the probe over the surface, causing the probe to be near or on the surface during only a very limited portion of the scan and therefore able to scan quickly over rough surfaces without undue damage to the probe or surface. Both scanning tunneling microscopes and atomic force microscopes employing the invention are disclosed. The scanning tunneling microscope is shown with both digital and analog control of the movement of the probe.

REFERENCES:
patent: 4618767 (1986-10-01), Smith et al.
patent: 4665313 (1987-05-01), Wells
patent: 4724318 (1988-02-01), Binnig
patent: 4814622 (1989-03-01), Gregory et al.
patent: 4823004 (1989-04-01), Kaiser et al.
patent: 4902892 (1990-02-01), Okayama et al.

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