Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer
Reexamination Certificate
2008-02-25
2011-12-27
Cao, Phat (Department: 2813)
Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
On insulating substrate or layer
C438S164000, C257SE21294
Reexamination Certificate
active
08084305
ABSTRACT:
A semiconductor device comprises a semiconductor mesa overlying a dielectric layer, a gate stack formed overlying the semiconductor mesa, and an isolation spacer formed surrounding the semiconductor mesa and filling any undercut region at edges of the semiconductor mesa.
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Ke Chung-Hu
Ko Chih-Hsin
Lee Wen-Chin
Yeo Yee-Chia
Cao Phat
Doan Nga
Haynes and Boone LLP
Taiwan Semiconductor Manufacturing Company , Ltd.
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