4. Radiant energy
  5. Ion generation
  6. Field ionization type

Hugh A. Walton

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Ion source and metals used in making components thereof and...

Radiant energy – Ion generation – Arc type
Reexamination Certificate

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Ion source with multi-piece outer cathode

Radiant energy – Ion generation – Field ionization type
Reexamination Certificate

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Ion source with multi-piece outer cathode

Radiant energy – Ion generation – Field ionization type
Reexamination Certificate

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Sputter coating apparatus including ion beam source(s), and...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2385161

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