Radiant energy – Ion generation – Field ionization type
Patent
1985-03-14
1987-04-14
Anderson, Bruce C.
Radiant energy
Ion generation
Field ionization type
31511181, H01J 2700
Patent
active
046581430
ABSTRACT:
An ion source equipped with an ion beam exit slit for extracting ions from plasma generated in feed gas introduced into a discharge chamber, and with gas inlet or inlets for introducing the feed gas into the discharge chamber in close proximity of the ion beam exit slit. Ion extraction can be made stably without any deposit on the ion beam exit slit even when a boron halide is used as the feed gas. The effect of the ion source can be further enhanced by adding oxygen, hydrogen or gas of an oxygen-containing compound to the feed gas, and by using a microwave.
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patent: 4175234 (1979-11-01), Hunt et al.
patent: 4316090 (1982-02-01), Sakudo et al.
patent: 4318028 (1982-03-01), Perel et al.
patent: 4393333 (1983-07-01), Sakudo et al.
patent: 4447773 (1984-05-01), Aston
Koike Hidemi
Ninomiya Ken
Okada Osami
Ozasa Susumu
Sakudo Noriyuki
Anderson Bruce C.
Hitachi , Ltd.
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