Ion scattering spectroscope

Details Ion scattering spectroscope Ion scattering spectroscope

1993-06-17

1994-12-06

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Positive ion probe or microscope type

250305, 250287, 250307, H01J 37252

Patent

active

053713664

ABSTRACT:
A time-of-flight (TOF) type ion scattering spectroscope (ISS) using a mixture of ions of different masses. Ions having a mass smaller than the smallest mass of the atoms in the sample surface can precisely discriminate light-weight object atoms of slightly different masses. Ions having an intermediate mass between heavy-weight atoms and light-weight atoms in the sample surface can precisely discriminate heavy-weight object atoms of slightly different masses.

REFERENCES:
patent: 5182453 (1993-01-01), Hayashi
K. Sumitomo et al; "A TOF-ISS/ERDA Apparatus for Solid Surface Analysis"; Nuclear Instruments & Methods in Physics Research/Section B; Jun., 1988; pp. 871-875.
N. Sugiyama et al; "In Situ Analysis of Gallium Arsenide Surfaces by Coaxial Impact Collision Ion-Scattering Spectroscopy with an Off-Axis Ion Source"; Japanese Journal of Applied Physics 29; Oct., 1990; pp. L1922-L1925.
M. Katayama et al; "Coaxial Impact-Collison Ion Scattering Spectroscopy (CAICISS): A Novel Method for Surface Structure Analysis"; Nuclear Instruments and Methods in Physics Research; 1988; pp. 857-861.

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