Ion Scattering spectrometer with two analyzers preferably in tan

Details Ion Scattering spectrometer with two analyzers preferably in tan Ion Scattering spectrometer with two analyzers preferably in tan

1975-06-27

1977-11-15

Church, Craig E.

Radiant energy

Inspection of solids or liquids by charged particles

Positive ion probe or microscope type

250292, 250296, 250307, H01J 3726

Patent

active

040587240

ABSTRACT:
Improved apparatus and method for measuring ions scattered from a surface, to thereby determine the mass of atoms at the surface. The apparatus includes two analyzers, preferably an energy analyzer and mass analyzer positioned in tandem. The mass analyzer may be tuned to pass only ions having the same mass as ions in an incident ion beam, and to reject sputtered ions, some of which may have the requisite energy to pass through the energy analyzer under a given set of conditions.

REFERENCES:
patent: 3480774 (1969-11-01), Smith
patent: 3665182 (1972-05-01), Goff
patent: 3845304 (1974-10-01), Tamura
patent: 3859226 (1975-01-01), Schillalies
"Direct Comparison of Ion Scattering and Secondary Ion Emission as Tools For Analysis of Metal Surfaces," Greendoner et al., Applied Physics, vol. 4, pp. 243-248, 1974.

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