Ion scattering spectrometer including cylindrical mirror analyze

Details Ion scattering spectrometer including cylindrical mirror analyze Ion scattering spectrometer including cylindrical mirror analyze

1977-11-28

1978-09-26

Dixon, Harold A.

Radiant energy

Inspection of solids or liquids by charged particles

Positive ion probe or microscope type

250281, G01N 2300

Patent

active

041173228

ABSTRACT:
An improved ion scattering spectrometer (ISS) in which a cylindrical mirror analyzer is provided and an ion gun for providing a beam of noble gas ions which are impinged upon and elastically scattered from a surface to be analyzed is axially positioned within the inner cylinder of the analyzer. A detector for ions passed through the analyzer is axially positioned proximate an energy resolving aperture located at the conjugate point of ions scattered from the sample to thereby detect ions having a narrow energy pass band. The analyzer has a substantially uniform response over a target area that is at least a thousand times the cross-sectional area of the ion beam impinged upon the target so that elemental imaging of the surface can be accomplished.

REFERENCES:
patent: 3818228 (1974-06-01), Palmberg
patent: 3935453 (1976-01-01), Liebl

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