Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
Patent
1992-02-18
1993-01-26
Berman, Jack I.
Radiant energy
Inspection of solids or liquids by charged particles
Positive ion probe or microscope type
250305, H01J 37252
Patent
active
051824531
ABSTRACT:
In a coaxial impact collision ion scattering spectrometer (CAICISS), a Wien filter composed of a pair of electrodes 13 and a magnet 20 is placed in the flying path of the ions. The Wien filter acts as (a) a chopper for intermittently chopping ion beam irradiated onto the sample 17, and as (b) a filter that directs only ions having predetermined mass and electrical charges toward an aperture 16 and deviates other ions or non-ionized atoms from the aperture 16. Thus non-ionized atoms or impurity ions having different mass or electric charge are prevented from irradiating the sample 17. In another CAICISS, the axis A of the ion source 11 is set oblique to the axis B of the ion beam irradiated onto the sample 14, and only ions having predetermined mass and electrical charges are deflected from the axis A to the axis B by a pair of deflecting electrodes 13.
REFERENCES:
patent: 4100409 (1978-07-01), Brongersma
patent: 5068535 (1991-11-01), Rabalais
English Abstract of Japanese Laid-Open (Kokai) Patent Application No. 59-66043.
Berman Jack I.
Shimadzu Corporation
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