4. Radiant energy
  5. Irradiation of objects or material
  6. Irradiation of semiconductor devices

Manabu Hamagaki

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Electron beam excited ion irradiation apparatus

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Electron beam-excited ion beam source

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Electron or ion source
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Ion-producing apparatus

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Electron or ion source
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Profile ID: LFUS-PAI-P-1002399

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