Ion microprobes

Details Ion microprobes Ion microprobes

1975-04-01

1976-06-15

Church, Craig E.

Radiant energy

Inspection of solids or liquids by charged particles

Positive ion probe or microscope type

250399, H01J 3726

Patent

active

039639231

ABSTRACT:
An ion microprobe has an ion extraction arrangement formed by a pair of cone-shaped guard electrodes. The guard electrodes are positioned to lie tangentially to each other and to a planar surface from which ions are extracted with their apexes coinciding at the point of extraction. They have equal apex angles of preferably 90.degree.. An aperture is provided at the common apex and electric fields oppositely polarized with respect to each other are provided within each guard electrode for ion and electron beam extraction.

REFERENCES:
patent: 3894233 (1975-07-01), Tamura

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