Ion-emission microanalyzer microscope

Details Ion-emission microanalyzer microscope Ion-emission microanalyzer microscope

1977-07-13

1978-08-15

Smith, Alfred E.

Radiant energy

Inspection of solids or liquids by charged particles

Positive ion probe or microscope type

250397, 250292, H01J 3726

Patent

active

041075277

ABSTRACT:
An ion-emission microanalyzer microscope, comprising a vacuum chamber housing an ion source with a focusing system for bombarding the surface of an object under investigation. In addition, arranged along the beam of secondary ions emitted by the bombarded surface of the object under investigation, in the vacuum chamber, are an immersion objective, an aperture diaphragm, an ion-optical converter, a mass filter, and an ion detector. The ion-optical converter has a through opening coaxial with the secondary ion beam, performing the function of an aperture for separating an image element. Outside the vacuum chamber, there is a recording device connected to the output of the ion detector.

REFERENCES:
patent: 2947868 (1960-08-01), Herzog
patent: 2976413 (1961-03-01), Robinson
patent: 3517191 (1970-06-01), Liebl
patent: 3986025 (1976-10-01), Fujiwara et al.

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