Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
Patent
1997-09-03
2000-09-12
Anderson, Bruce
Radiant energy
Inspection of solids or liquids by charged particles
Positive ion probe or microscope type
250307, 25049221, H01J 3728
Patent
active
061181226
ABSTRACT:
An ion beam working apparatus which can carry out a plurality of workings with good accuracy automatically is provided. When an ion beam current is changed, by setting differences in ion beam optical conditions, working without focal point shift or working position shift becomes possible and throughput increases can be expected. Differences in ion beam optical conditions of when an ion beam current is changed are stored in a computer and when the ion beam current amount is changed midway through automatic working those stored differences in ion beam optical conditions are set in the ion beam optical system.
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Koyama Yoshihiro
Sugiyama Yasuhiko
Anderson Bruce
Seiko Instruments Inc.
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