Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
Patent
1997-06-20
1998-12-29
Nguyen, Kiet T.
Radiant energy
Inspection of solids or liquids by charged particles
Positive ion probe or microscope type
H01J 37317
Patent
active
058544887
ABSTRACT:
To carry out machining by a focused ion beam using an assist gas including steam gas. In a machining operation by a focused ion beam by using an assist gas including steam gas, as a method of supplying steam gas, the steam gas is supplied from salt hydrate and the pressure of steam is controlled by controlling the temperature of the salt hydrate. As a method for supplying steam gas, when the steam gas is introduced into a vacuum chamber, the flow rate needs to be controlled by a control valve since the vapor pressure of water is very high, which amounts to a complicated gas supply system and which amounts to an expensive device. However, steam vapor having a low pressure is supplied by using salt hydrate, the introduction of gas to a vacuum chamber is made feasible only by passing the gas through a friction pipe and the amount of introducing a gas can be controlled by a simple system where only the temperature of the salt hydrate is controlled by an inexpensive temperature controller.
REFERENCES:
patent: 4983830 (1991-01-01), Iwasaki
patent: 5376791 (1994-12-01), Swanson et al.
Nguyen Kiet T.
Seiko Instruments Inc.
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