Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate
2011-01-18
2011-01-18
Wells, Nikita (Department: 2881)
Radiant energy
Irradiation of objects or material
Irradiation of semiconductor devices
C250S42300F, C250S492200, C315S111810
Reexamination Certificate
active
07872247
ABSTRACT:
A guide tube for an ion beam in an ion implanter which is located adjacent a semiconductor wafer being implanted has an outwardly tapering central bore, thereby alleviating problems of beam strike as the ion beam passes through the guide tube.
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Alcott Gregory Robert
Castle Matthew
Farley Marvin
Hilkene Martin
Mitchell Robert
Applied Materials Inc.
Boult Wade & Tennant
Wells Nikita
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