Ion beam device and method for carrying out potential measuremen

Details Ion beam device and method for carrying out potential measuremen Ion beam device and method for carrying out potential measuremen

1990-12-20

1992-09-08

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Positive ion probe or microscope type

250397, H01J 3728

Patent

active

051460890

ABSTRACT:
The invention relates to an ion beam device into which a secondary electron pectrometer is integrated, the scintillator being formed by the central electrode of the objective lens. Such an ion beam device permits not only the usual boring of holes but also at the same time very accurate potential measurements.

REFERENCES:
patent: 3534385 (1970-10-01), Castaing et al.
patent: 3845305 (1974-10-01), Liebl
patent: 4728790 (1988-03-01), Plies
patent: 4896036 (1990-01-01), Rose et al.
patent: 4983830 (1991-01-01), Iwasaki
patent: 5061856 (1991-10-01), Frosien et al.

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