Ion beam apparatus and sample processing method

Details Ion beam apparatus and sample processing method Ion beam apparatus and sample processing method

2006-08-01

2006-08-01

Nguyen, Kiet T. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Positive ion probe or microscope type

C250S492210

Reexamination Certificate

active

07084399

ABSTRACT:
For the sake of realizing high throughput and high processing position accuracy in an ion beam apparatus, two kinds of ion beams for processing are prepared of which one is a focusing ion beam for high image resolution and an edge processing ion beam of large beam current for permitting a sectional edge portion to be processed sharply, whereby high processing position accuracy can be ensured even with a large current ion beam.

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