Interferometer systems for measuring displacement and...

Optics: measuring and testing – By light interference – For dimensional measurement

Reexamination Certificate

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C356S499000, C250S23700G

Reexamination Certificate

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07433048

ABSTRACT:
Interferometer systems for measuring displacement include a displacement interferometer. This interferometer includes a displacement converter responsive to a measuring beam of light. The displacement converter is configured to transform movement thereof in a direction orthogonal to the measuring beam of light into a change in path length between a reflective surface of the displacement converter and the measuring beam of light. The displacement converter may include a transmission grating and a displacement mirror or a reflecting grating.

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Office Action (Translation), German Patent Application No. 102005047162.5-52, Jan. 26, 2007.
Search Report (Partial), German Patent Application No. 1030035, Sep. 21, 2006.

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