Active solid-state devices (e.g. – transistors – solid-state diode – Schottky barrier – Specified materials
Reexamination Certificate
2005-08-30
2005-08-30
Pham, Long (Department: 2814)
Active solid-state devices (e.g., transistors, solid-state diode
Schottky barrier
Specified materials
C257S485000, C257S740000, C257S751000, C257S761000, C257S767000, C438S256000, C438S399000, C438S674000, C438S903000
Reexamination Certificate
active
06936906
ABSTRACT:
The present invention generally relates to filling of a feature by depositing a barrier layer, depositing a seed layer over the barrier layer, and depositing a conductive layer over the seed layer. In one embodiment, the seed layer comprises a copper alloy seed layer deposited over the barrier layer. For example, the copper alloy seed layer may comprise copper and a metal, such as aluminum, magnesium, titanium, zirconium, tin, and combinations thereof. In another embodiment, the seed layer comprises a copper allloy seed layer deposited over the barrier layer and a second seed layer deposited over the copper alloy seed layer. The copper alloy seed layer may comprise copper and a metal, such as aluminum, magnesium, titanium, zirconium, tin, and combinations thereof The second seed layer may comprise a metal, such as undoped copper. In still another embodiment, the seed layer comprises a first seed layer and a second seed layer. The first seed layer may comprise a metal, such as aluminum, magnesium, titanium, zirconium, tin, and combinations thereof. The second seed layer may comprise a metal, such as undoped copper.
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Chang Mei
Chen Ling
Chung Hua
Yu Jick
Applied Materials Inc.
Louie Wai-Sing
Moser Patterson & Sheridan LLP
Pham Long
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