Semiconductor device manufacturing: process – With measuring or testing – Electrical characteristic sensed
Reexamination Certificate
2006-02-07
2006-02-07
Lebentritt, Michael (Department: 2812)
Semiconductor device manufacturing: process
With measuring or testing
Electrical characteristic sensed
C438S017000, C438S011000
Reexamination Certificate
active
06995027
ABSTRACT:
A test structure for assessing the reliability of a dielectric of a circuit element in an integrated circuit includes a plurality of test circuit elements and a plurality of contact pads, wherein at least some of the test circuit elements share one or more of the contact pads. In this way, a failure event can be detected with a reduced number of contact pads, thereby significantly reducing the area of floor space occupied by the test structure.
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Geilenkeuser Rolf
Weidner Jörg-Oliver
Wieczorek Karsten
Advanced Micro Devices , Inc.
Lebentritt Michael
Stevenson Andre′
Williams Morgan & Amerson P.C.
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