Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Reexamination Certificate
2005-08-16
2005-08-16
Williams, Hezron (Department: 2856)
Measuring and testing
Speed, velocity, or acceleration
Angular rate using gyroscopic or coriolis effect
C073S514320
Reexamination Certificate
active
06928872
ABSTRACT:
An integrated gyroscope, including an acceleration sensor formed by: a driving assembly; a sensitive mass extending in at least one first and second directions and being moved by the driving assembly in the first direction; and by a capacitive sensing electrode, facing the sensitive mass. The acceleration sensor has an rotation axis parallel to the second direction, and the sensitive mass is sensitive to forces acting in a third direction perpendicular to the other directions. The capacitive sensing electrode is formed by a conductive material region extending underneath the sensitive mass and spaced therefrom by an air gap.
REFERENCES:
patent: 5275047 (1994-01-01), Zabler et al.
patent: 5604312 (1997-02-01), Lutz
patent: 5635638 (1997-06-01), Geen
patent: 5747690 (1998-05-01), Park et al.
patent: 5780739 (1998-07-01), Kang et al.
patent: 5792954 (1998-08-01), Corkum et al.
patent: 5945599 (1999-08-01), Fujiyoshi et al.
patent: 5955668 (1999-09-01), Hsu et al.
patent: 6089089 (2000-07-01), Hsu
patent: 6327907 (2001-12-01), Park
patent: 6349597 (2002-02-01), Folkmer et al.
patent: 6474160 (2002-11-01), Stewart et al.
patent: 6513380 (2003-02-01), Reeds et al.
patent: 2002/0134154 (2002-09-01), Hsu et al.
patent: 0 911 606 (1999-04-01), None
patent: 1 098 170 (2001-01-01), None
patent: WO 97/15066 (1997-04-01), None
patent: WO 99/19734 (1999-04-01), None
patent: WO 00/29855 (2000-05-01), None
Durante Guido Spinola
Merassi Angelo
Zerbini Sarah
Bellamy Tamiko
Bennett II Harold H.
Jorgenson Lisa K.
Seed IP Law Group PLLC
STMicroelectronics S.r.l.
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