Integrated circuit system for suppressing short channel effects

Details Integrated circuit system for suppressing short channel effects Integrated circuit system for suppressing short channel effects

2011-01-11

2011-01-11

Leung, Quyen (Department: 2834)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

C257S394000

Reexamination Certificate

active

07867835

ABSTRACT:
An integrated circuit system that includes: providing a substrate including an active device with a gate and a gate dielectric; forming a first liner, a first spacer, a second liner, and a second spacer adjacent the gate; forming a material layer over the integrated circuit system; forming an opening between the material layer and the first spacer by removing a portion of the material layer, the second spacer, and the second liner to expose the substrate; and forming a source/drain extension and a halo region through the opening.

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