Integrated circuit devices having dielectric regions...

Details Integrated circuit devices having dielectric regions... Integrated circuit devices having dielectric regions...

2006-04-04

2006-04-04

Prenty, Mark V. (Department: 2822)

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

C257S310000

Reexamination Certificate

active

07023037

ABSTRACT:
A dielectric region, such as a ferroelectric dielectric region of an integrated circuit capacitor, is protected by a multi-layer insulation structure including a first relatively thin insulation layer, e.g., an aluminum oxide or other metal oxide layer, and a second, thicker insulating layer, e.g., a second aluminum oxide or other metal oxide layer. Before formation of the second insulation layer, the first insulation layer and the dielectric preferably annealed, which can increase a remnant polarization of the dielectric region. The first insulation layer can serve as a hydrogen diffusion barrier during formation of the second insulation layer and other overlying structures. In this manner, degradation of the dielectric can be reduced. Devices and fabrication methods are discussed.

REFERENCES:
patent: 5216572 (1993-06-01), Larson et al.
patent: 5728603 (1998-03-01), Emesh et al.
patent: 6107136 (2000-08-01), Melnick et al.
patent: 6188100 (2001-02-01), Hermes
patent: 6204158 (2001-03-01), Hendrix
patent: 6284588 (2001-09-01), Yu
patent: 6403441 (2002-06-01), Takehiro et al.
patent: 6740531 (2004-05-01), Cho et al.
patent: 2002/0063274 (2002-05-01), Kanaya et al.
patent: 0 747 938 (1996-12-01), None
patent: 7-030074 (1995-01-01), None
patent: 1998-0006321 (1998-03-01), None
patent: 2000-0018995 (2000-04-01), None
Notice to Submit Response, Korean Application No. 10-2000-0046615, Jul. 2002.

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