Integrated circuit capacitors having a dielectric layer...

Details Integrated circuit capacitors having a dielectric layer... Integrated circuit capacitors having a dielectric layer...

2006-05-09

2006-05-09

Weiss, Howard (Department: 2814)

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

C257S309000

Reexamination Certificate

active

07042042

ABSTRACT:
Integrated circuit capacitors are provided having an electrically insulating electrode support layer having an opening therein on an integrated circuit substrate. A U-shaped lower electrode is provided in the opening and a first capacitor dielectric layer extends on an inner surface and an outer portion of the U-shaped lower electrode. A second capacitor dielectric layer extends between the outer portion of the U-shaped lower electrode and the first capacitor dielectric and also extends between the outer portion of the U-shaped lower electrode and an inner sidewall of the opening. An upper electrode extends on the first dielectric layer.

REFERENCES:
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patent: 6573553 (2003-06-01), Nakamura
patent: 10-50951 (1998-02-01), None
Arima, H., et al., “A Novel Stacked Capacitor Cell with Dual Cell Plate for 64 Mb DRAMs”, IEDM 1990, pp. 651-654.

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