Inspection system with oblique viewing angle

Details Inspection system with oblique viewing angle Inspection system with oblique viewing angle

2007-09-04

2007-09-04

Allen, Stephone B. (Department: 2872)

Optical: systems and elements

Compound lens system

Microscope

C359S431000, C359S637000

Reexamination Certificate

active

10511084

ABSTRACT:
Apparatus for imaging an area of a surface along a viewing angle that is oblique to the surface includes an afocal optical relay, which is adapted to form a tilted initial image of the area by collecting optical radiation from the area along an optical axis oriented at the viewing angle. A tilt correction unit is coupled to correct a tilt of the initial image so as to form a substantially undistorted intermediate image. A magnification module is coupled to focus the intermediate image onto an image detector.

REFERENCES:
patent: 5633721 (1997-05-01), Mizutani
patent: 5729383 (1998-03-01), Chastang et al.
patent: 6594076 (2003-07-01), Satou
patent: 6778267 (2004-08-01), Drake
patent: 2005/0219518 (2005-10-01), Korngut et al.

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