Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
Patent
1990-10-23
1991-10-29
Berman, Jack I.
Radiant energy
Inspection of solids or liquids by charged particles
Positive ion probe or microscope type
250397, 250396R, H01J 308
Patent
active
050618512
ABSTRACT:
The apparatus comprising an ion source producing an ion beam, a limiting aperture plate having a limiting aperture through which the ion beam passes, a condensor lens making the ion beam parallel, monitoring electrodes generating an electric field which deflect the paralleled ion beam, a monitoring aperture plate having a monitoring aperture and an objective lens focusing the ion beam is inspected. A voltage is applied to the monitoring electrodes to deflect the ion beam and an electric current which flows in the monitoring aperture plate is detected. A diameter of the limiting aperture is determined based on a change of the electric current with respect to deflecting of the ion beam. On a surface of a sample, secondary charged particles are generated by collision of the ion beam. Intensity of the particles can be detected instead of detecting the electric current. A dimameter of the limiting aperture can also be determined based on a change of the intensity with respect to deflecting of the ion beam.
REFERENCES:
patent: Re33193 (1990-04-01), Yamaguchi et al.
patent: 4334156 (1982-06-01), Bohlen et al.
patent: 4937458 (1990-06-01), Fujikura
patent: 4939371 (1990-07-01), Goto
Berman Jack I.
Dai Nippon Insatsu Kabushiki Kaisha
Nguyen Kiet T.
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