Inspection data analyzing apparatus for in-line inspection with

Details Inspection data analyzing apparatus for in-line inspection with Inspection data analyzing apparatus for in-line inspection with

1997-08-28

2000-01-18

Nguyen, Hoa T.

Error detection/correction and fault detection/recovery

Pulse or data error handling

Digital logic testing

714745, 3261581, 356237, G01R 3128, G06F 1110

Patent

active

060165626

ABSTRACT:
An ordinary user can easily learn a step at which a problem occurs during semiconductor manufacturing processes and improve the yield of manufacturing products and the quality of the products. At a certain in-line inspection step, a CPU (3) stores data signals (V1) taken by an inspection apparatus (1) into a memory (2), and reads a result (V6) obtained at a precedent step and stores the same in the memory (2). The CPU (3) reads stored data signals (V2) from the memory (2), performs comparison or referral on data about defects which are detected at a current step and the result (V6) regarding the precedent step, and generates a defect data analysis processing result signal (V5) regarding the current step. The result (V5) consists of disappeared defect data, common defect data, new defect data to which a label of a current step number is assigned, and reappeared defect data. The CPU (3) performs the processing above for each in-line inspection step, edits resultant data, and generates histogram data which provide the number of detected defects and the number of disappeared defects for each step.

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