Inspection by a transmission electron microscope of a sample

Details Inspection by a transmission electron microscope of a sample Inspection by a transmission electron microscope of a sample

2006-05-02

2006-05-02

Berman, Jack I. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

C250S304000, C250S307000, C250S311000, C451S041000, C451S364000

Reexamination Certificate

active

07038218

ABSTRACT:
A method of manufacturing a transmission electron microscope inspection sample. The sample is mounted into a recess in the mount and the sample is grinded to a preset target thickness. A recess for mounting the sample and a groove for separating the sample from the recess are formed on a top surface of the mount. The sample is fixed into the recess using mounting wax. The protruding portion of the sample protrudes above the mount and is grinded by the grinder. The depth of the recess is based on the target thickness of the sample. The protruding portion of the sample is grinded to the top surface of the mount.

REFERENCES:
patent: 5472566 (1995-12-01), Swann et al.
patent: 5791973 (1998-08-01), Nishio
patent: 6005248 (1999-12-01), Mori et al.

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