Inspection apparatus for inspecting patterns of a substrate

Details Inspection apparatus for inspecting patterns of a substrate Inspection apparatus for inspecting patterns of a substrate

2009-09-22

2011-10-11

Bella, Matthew C (Department: 2624)

Image analysis

Applications

Manufacturing or product inspection

C382S141000, C382S149000, C382S151000

Reexamination Certificate

active

08036447

ABSTRACT:
A pattern inspection apparatus has a setting unit of a plurality of cell areas A and B of different cell comparison pitches and inspects the plurality of cell areas of the different cell comparison pitches in accordance with settings of the setting unit. As information to read out image data for an inspection image and a reference image from an image memory, in addition to position information of a defective image, identification information showing either a cell comparison or a die comparison and relative position information of the reference image can be set. The apparatus also has a unit for setting a plurality of inspection threshold values every inspection area and inspects a plurality of inspection areas by the plurality of inspection threshold values.

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