Initiating test runs based on fault detection results

Details Initiating test runs based on fault detection results Initiating test runs based on fault detection results

2002-12-18

2009-08-25

Maskulinski, Michael C (Department: 2113)

Error detection/correction and fault detection/recovery

Data processing system error or fault handling

Reliability and availability

Reexamination Certificate

active

07581140

ABSTRACT:
A method and apparatus are provided for initiating test runs based on a fault detection result. The method comprises receiving operational data associated with processing of a workpiece by a processing tool, processing the operational data to determine fault detection results; and causing a test run to be performed based on at least a portion of the fault detection results.

REFERENCES:
patent: 5940300 (1999-08-01), Ozaki
patent: 6090632 (2000-07-01), Jeon et al.
patent: 6560503 (2003-05-01), Toprac et al.
patent: 6629009 (2003-09-01), Tamaki
patent: 6766208 (2004-07-01), Hsieh
patent: 6890773 (2005-05-01), Stewart

Affiliated with

Also associated with

Rating

Initiating test runs based on fault detection results does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Initiating test runs based on fault detection results, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Initiating test runs based on fault detection results will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4073450