4. Data processing: measuring, calibrating, or testing
  5. Testing system
  6. Including multiple test instruments

Brian K. Cusson

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Adjusting a sampling rate based on state estimation results

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate

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Adjusting a trace data rate based upon a tool state

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate

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Advanced process control of the manufacture of an...

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed
Reexamination Certificate

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Conflict resolution among multiple controllers

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate

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Determination of a process flow based upon fault detection...

Semiconductor device manufacturing: process – With measuring or testing
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