Information storage element, manufacturing method thereof,...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate

Reexamination Certificate

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C438S052000, C438S258000, C438S266000, C438S587000, C438S588000, C257SE21621, C257SE21622, C257SE21623, C257SE21624, C257S321000, C257S320000, C257S316000, C257S548000, C257S331000

Reexamination Certificate

active

10535941

ABSTRACT:
An information memory device capable of reading and writing of information by mechanical operation of a floating gate layer, in which a gate insulation film has a cavity (6), and a floating gate layer (5) having two stable deflection states in the cavity (6), the state stabilized by deflecting toward the channel side of transistor, and the state stabilized by deflecting toward the gate (7) side, writing and reading of information can be made by changing the stable deflection state of the floating gate layer (5) by Coulomb interactive force between the electrons (or positive holes8) accumulated in the floating gate layer (5) and external electric field, and by reading the channel current change based on the state of the floating gate layer (5).

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