Increasing adherence of dielectrics to phase change materials

Details Increasing adherence of dielectrics to phase change materials Increasing adherence of dielectrics to phase change materials

2004-10-14

2008-03-04

Le, Thao P. (Department: 2818)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

C257SE31029, C438S407000, C438S440000

Reexamination Certificate

active

07338857

ABSTRACT:
A phase change material is formed over a dielectric material. An impurity is introduced into the dielectric to improve the adherence of said dielectric to said phase change material.

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