Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of...
Reexamination Certificate
2007-10-30
2007-10-30
Smith, Matthew (Department: 2823)
Semiconductor device manufacturing: process
Coating of substrate containing semiconductor region or of...
C438S765000, C438S770000, C438S771000, C977S742000, C257SE21128, C257SE51040
Reexamination Certificate
active
11009854
ABSTRACT:
Method and system for fabricating an array of two or more carbon nanotube (CNT) structures on a coated substrate surface, the structures having substantially the same orientation with respect to a substrate surface. A single electrode, having an associated voltage source with a selected voltage, is connected to a substrate surface after the substrate is coated and before growth of the CNT structures, for a selected voltage application time interval. The CNT structures are then grown on a coated substrate surface with the desired orientation. Optionally, the electrode can be disconnected before the CNT structures are grown.
REFERENCES:
patent: 6858197 (2005-02-01), Delzeit
patent: 2004/0046539 (2004-03-01), Rhoads
patent: 2004/0150865 (2004-08-01), Chen et al.
patent: 2004/0211271 (2004-10-01), Han et al.
patent: 2005/0112048 (2005-05-01), Tsakalakos et al.
Kim Su C.
Padilla Robert M.
Schipper John F.
Smith Matthew
United States of America as Represented by the Administrator of
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