In-situ profile measurement in an electroplating process

Details In-situ profile measurement in an electroplating process In-situ profile measurement in an electroplating process

2005-05-25

2010-11-23

Ryan, Patrick (Department: 1795)

Electrolysis: processes, compositions used therein, and methods

Electrolytic coating

Involving measuring, analyzing, or testing

C205S082000, C205S096000, C205S123000

Reexamination Certificate

active

07837851

ABSTRACT:
A method and apparatus for measuring differential voltages in an electrolyte of an electrochemical plating cell. Current densities are calculated from the measured differential voltages and correlated to thickness values of plated materials. A real time thickness profile may be generated from the thickness values.

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