In-situ pre-PECVD oxide deposition process for treating SOG

Details In-situ pre-PECVD oxide deposition process for treating SOG In-situ pre-PECVD oxide deposition process for treating SOG

1997-09-08

1999-01-19

Niebling, John F.

Semiconductor device manufacturing: process

Coating of substrate containing semiconductor region or of...

Multiple layers

438778, 438780, 438782, 438787, 438788, H01L 2131

Patent

active

058613455

ABSTRACT:
An in situ inter-dielectric process is disclosed for forming multilevel metal structures. The process includes the steps of:

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