In-situ endpoint detection for membrane formation

Details In-situ endpoint detection for membrane formation In-situ endpoint detection for membrane formation

1998-05-04

2000-05-09

Font, Frank G.

Optics: measuring and testing

By configuration comparison

With photosensitive film or plate

369382, G01B 1106

Patent

active

060611375

ABSTRACT:
A method of in-situ endpoint detection for membrane formation including directing light from a light source onto one side of a membrane structure having at least one etchable component for the formation of a membrane and etching the membrane structure so as to form the membrane while sensing the light from the light source on an opposite side of the membrane structure in-situ during the etching to detect a thickness of the membrane. Generally, the etching step includes fountain cup etching with the light source being a fiber optic mounted in the fountain cup and a detector mounted in the cap.

REFERENCES:
patent: 5131752 (1992-07-01), Yu et al.

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