Impedance matching network with termination of secondary RF...

Details Impedance matching network with termination of secondary RF... Impedance matching network with termination of secondary RF...

2005-05-03

2005-05-03

Philogene, Haissa (Department: 2828)

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Plasma generating

C315S111510, C324S652000, C324S637000, C156S345480, C118S7230IR, C024S298000

Reexamination Certificate

active

06888313

ABSTRACT:
There is provided a secondary reactive termination circuit connected between the output of the RF power generator and the input of the plasma chamber to allow the tight regulation or limiting of the voltage and current components of the secondary frequencies within the process plasma. The secondary reactive circuit controls the impedance of the match network designed primarily to operate at the fundamental frequency of the RF power generator as seen by secondary frequencies in the system. A variable capacitor gives the operator the advantage of being able to tightly regulate the voltage, current, and power within a process at discrete frequencies without concern for impedance variability induced by other components in the system.

REFERENCES:
patent: 5288971 (1994-02-01), Knipp
patent: 5339039 (1994-08-01), Carlile et al.
patent: 5849136 (1998-12-01), Mintz et al.
patent: 5889252 (1999-03-01), Williams et al.
patent: 6028285 (2000-02-01), Khater et al.
patent: 6345588 (2002-02-01), Stimson
patent: 6388382 (2002-05-01), Doi et al.
patent: 6592710 (2003-07-01), Benjamin et al.
patent: 6758948 (2004-07-01), Johnson

Affiliated with

Also associated with

Rating

Impedance matching network with termination of secondary RF... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Impedance matching network with termination of secondary RF..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Impedance matching network with termination of secondary RF... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3442478