Immersion objective lens for e-beam inspection

Details Immersion objective lens for e-beam inspection Immersion objective lens for e-beam inspection

2005-02-22

2005-02-22

Font, Frank G. (Department: 2883)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S306000, C250S307000, C250S311000, C250S3960ML, C250S3960ML, C250S397000, C250S398000

Reexamination Certificate

active

06858843

ABSTRACT:
Disclosed is an apparatus for electron beam inspection of a specimen with improved potential throughput. The apparatus includes an immersion objective lens focusing the primary electrons into a beam that impinges onto a spot on the specimen. Also disclosed is a method for automatic electron beam inspection of a specimen. The method includes producing a magnetic field towards the specimen that reduces aberration towards an outer portion of the multiple pixel imaging region.

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