Immersion lithographic process using a conforming immersion...

Details Immersion lithographic process using a conforming immersion... Immersion lithographic process using a conforming immersion...

2006-10-24

2006-10-24

Duda, Kathleen (Department: 1756)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making electrical device

C430S322000

Reexamination Certificate

active

07125652

ABSTRACT:
A method of making a device using a lithographic system having a lens from which an exposure pattern is emitted. A conforming immersion medium can be positioned between a photo resist layer and the lens. The photo resist layer, which can be disposed over a wafer, and the lens can be brought into intimate contact with the conforming immersion medium. The photo resist can then be exposed with the exposure pattern so that the exposure pattern traverses the conforming immersion medium.

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Franklin, “Refractive Index Matching: A General Method for Enhancing the Optical Clarity of a Hydrogel Matrix”, Chem. Mater. 2002, 14, 4487-4489.

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