Image-to-image registration focused ion beam system

Details Image-to-image registration focused ion beam system Image-to-image registration focused ion beam system

1995-07-06

1996-07-30

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Positive ion probe or microscope type

250307, H01J 3726

Patent

active

055414117

ABSTRACT:
An image-to-image registration system employs interactive computer graphic systems to align and register a number of image representations of a particular device from a variety of sources including, for example, optical microscopic images, computer aided design representations, etc., to an image obtained by a focused ion beam system. The registration enables accurate alignment of the images to the FIB image so that subsurface features which may not be detectable via the FIB image may be located and used to guide operation of the FIB system for milling or conductor/insulator deposition or the like. Counting of aluminum grains is enhanced by use of the invention to register images of a sample taken at several different tilt angles. The registered images are combined to give a more accurate representation of grain boundaries, enabling a more accurate grain count.

REFERENCES:
patent: 3326176 (1967-06-01), Sibley
patent: 4393311 (1983-07-01), Feldman et al.
patent: 4451738 (1984-05-01), Smith
patent: 4683378 (1987-07-01), Shimase et al.
patent: 5054097 (1991-10-01), Flinois et al.
patent: 5086230 (1992-02-01), Adachi et al.
patent: 5159643 (1992-10-01), Kaga et al.
patent: 5278408 (1994-01-01), Kakibayashi et al.
patent: 5401972 (1995-03-01), Talbot et al.

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