Image forming method and electron microscope

Details Image forming method and electron microscope Image forming method and electron microscope

2008-03-14

2010-11-23

Berman, Jack I (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

C250S306000, C250S307000, C250S310000

Reexamination Certificate

active

07838834

ABSTRACT:
As an image forming method including comparison between images for three-dimensional image construction or the like and an apparatus for forming such images, there are provided an image forming method and an electron microscope capable of obtaining with high accuracy or efficiency information required for comparison. In the image forming method, an image is formed on the basis of comparison between a plurality of images obtained by applying an electron beam to a specimen at different tilt angles. The method includes obtaining a first transmission image with the electron beam applied in a first direction and a second transmission image with the electron beam applied in a second direction, the second transmission image being formed within a region different from a peripheral blurred region resulting from tilting, and making a search in the first transmission image by using the second transmission image.

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