4. Radiant energy
  5. Ionic separation or analysis

Hitachi-High Technologies Corporation

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Electron beam drawing apparatus

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Image forming method and electron microscope

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
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Mass spectrometer

Radiant energy – Ionic separation or analysis
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Report format setting method and apparatus, and defect...

Data processing: presentation processing of document – operator i – Presentation processing of document – Layout
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