Image display system for a stroboscopic scanning electron micros

Details Image display system for a stroboscopic scanning electron micros Image display system for a stroboscopic scanning electron micros

1983-07-27

1986-04-08

Smith, Alfred E.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

324158D, G01N 23225, H01J 3728

Patent

active

045815348

ABSTRACT:
This invention relates to an image display system for a stroboscopic scanning electron microscope. In a stroboscopic scanning electron microscope having a pulse gate mechanism for chopping an electron beam and a mechanism for arbitrarily changing the phase relation between a voltage applied to a sample and the chopping, the phase change of chopping is carried out periodically and continuously and a gate circuit provided between a detector for detecting scondary electrons or deflected electrons and an image display for displaying a video signal of the secondary electron or the reflected electron to be in synchronism with the phase change allows the video signal to pass therethrough only during a certain period of phase change and to be displayed.

REFERENCES:
patent: 4486660 (1984-12-01), Feuerbaum
Taylor, D. M., J. Phys. D: Appl. Phys., vol. 11, 1978, pp. 2443-2454.

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